Ion-beam-produced Damage an... - Researchers

Ion-beam-produced Damage and its Stability in AIN Films

Citation

Kucheyev, S, Williams, J, Zou, J et al. 2002, 'Ion-beam-produced Damage and its Stability in AIN Films', Journal of Applied Physics, vol. 92, no. 7, pp. 3554-3558.

Year

2002

ANU Authors

Professor Jim Williams
Professor Chennupati Jagadish

Field of Research

Plasma Physics; Fusion Plasmas; Electrical Discharges

Updated: 19 April 2024 / Responsible Officer: Director (Research Services Division) / Page Contact: Researchers