Ion-beam-produced Damage and its Stability in AIN Films

Citation

Kucheyev, S, Williams, J, Zou, J et al 2002, 'Ion-beam-produced Damage and its Stability in AIN Films', Journal of Applied Physics, vol. 92, no. 7, pp. 3554-3558.

Year

2002

Field of Research

  • Plasma Physics; Fusion Plasmas; Electrical Discharges

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