Selective localised modifications of silicon crystal by ultrafast laser induced micro-explosion

Citation

Rapp, L, Haberl, B, Bradby, J et al 2013, 'Selective localised modifications of silicon crystal by ultrafast laser induced micro-explosion', XVIII Laser Applications in Microelectronic and Optoelectronic Manufacturing LAMOM 2013, ed. Xianfan Xu, Guido Hennig, Yoshiki Nakata, Stephan W. Roth,, SPIE, Washington, pp. 1-6.

Year

2013

Field of Research

  • Surfaces And Structural Properties Of Condensed Matter

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