Selective localised modifications of silicon crystal by ultrafast laser induced micro-explosion
Citation
Rapp, L, Haberl, B, Bradby, J et al. 2013, 'Selective localised modifications of silicon crystal by ultrafast laser induced micro-explosion', XVIII Laser Applications in Microelectronic and Optoelectronic Manufacturing LAMOM 2013, ed. Xianfan Xu, Guido Hennig, Yoshiki Nakata, Stephan W. Roth,, SPIE, Washington, pp. 1-6.
Year
2013
Field of Research
- Surfaces And Structural Properties Of Condensed Matter