Non-linear direct-write lit... - Researchers

Non-linear direct-write lithography for semiconductor nanowire characterisation

Citation

Parkinson, P, Peng, K, Jiang, N et al. 2012, 'Non-linear direct-write lithography for semiconductor nanowire characterisation', Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD 2012), Institute of Electrical and Electronics Engineers (IEEE Inc), New Jersey USA, pp. 135-136.

Year

2012

ANU Authors

Professor H. Hoe Tan
Professor Chennupati Jagadish

Fields of Research

Elemental Semiconductors
Nanofabrication, Growth And Self Assembly

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