Non-linear direct-write lithography for semiconductor nanowire characterisation
Citation
Parkinson, P, Peng, K, Jiang, N et al. 2012, 'Non-linear direct-write lithography for semiconductor nanowire characterisation', Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD 2012), Institute of Electrical and Electronics Engineers (IEEE Inc), New Jersey USA, pp. 135-136.Year
2012ANU Authors
Fields of Research
- Elemental Semiconductors
- Nanofabrication, Growth And Self Assembly