Effect of implant temperature on secondary defects created by MeV Sn implantation is silicon

Citation

Wong Leung, Y, Jagadish, C, Conway, M et al 2001, 'Effect of implant temperature on secondary defects created by MeV Sn implantation is silicon', Journal of Applied Physics, vol. 89, pp. 2556-2559.

Year

2001

Field of Research

  • Metals And Alloy Materials

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