Origin of stress in radio f... - Researchers

Origin of stress in radio frequency magnetron sputtered zinc oxide thin films

Citation

Jagadish, C 2011, 'Origin of stress in radio frequency magnetron sputtered zinc oxide thin films', Journal of Applied Physics, vol. 109, no. 6, pp. 064905.

Year

2011

ANU Authors

Professor H. Hoe Tan
Professor Chennupati Jagadish

Field of Research

Condensed Matter Physics Not Elsewhere Classified

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