Single-step RIE fabrication process of low loss InP waveguide using CH4/H2 chemistry

Citation

Lysevych, M, Tan, H, Karouta, F et al. 2011, 'Single-step RIE fabrication process of low loss InP waveguide using CH4/H2 chemistry', Journal of the Electrochemical Society, vol. 158, no. 3, pp. H281-H284.

Year

2011

ANU Authors

Field of Research

  • General Relativity And Gravitational Waves

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