Measurement of the damage profile of ion-implanted GaAs using an automated optical profiler

Citation

Gal, M, Wengler, M, Ilyas, S et al 2001, 'Measurement of the damage profile of ion-implanted GaAs using an automated optical profiler', Nuclear Instruments and Methods in Physics Research: Section B, vol. 173, pp. 528-532.

Year

2001

Field of Research

  • Plasma Physics; Fusion Plasmas; Electrical Discharges

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