The Role of Fe on the Crystallisation of a-Si3N4 from Amorphous Si-N Formed by Ion Implantation

Citation

Li, Z, Wong Leung, Y, Deenapanray, P et al 1999, 'The Role of Fe on the Crystallisation of a-Si3N4 from Amorphous Si-N Formed by Ion Implantation', Nuclear Instruments and Methods in Physics Research: Section B, vol. 148, pp. 534-539.

Year

1999

Field of Research

  • Electrical And Electronic Engineering Not Elsewhere Classified

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