The Role of Fe on the Crystallisation of a-Si3N4 from Amorphous Si-N Formed by Ion Implantation
Citation
Li, Z, Wong Leung, Y, Deenapanray, P et al. 1999, 'The Role of Fe on the Crystallisation of a-Si3N4 from Amorphous Si-N Formed by Ion Implantation', Nuclear Instruments and Methods in Physics Research: Section B, vol. 148, pp. 534-539.Year
1999ANU Authors
Field of Research
- Electrical And Electronic Engineering Not Elsewhere Classified