ICP Dry Etching of ZnO and Effects of Hydrogen

Citation

Ip, K, Overberg, M, Baik, K et al. 2003, 'ICP Dry Etching of ZnO and Effects of Hydrogen', Solid-State Electronics, vol. 47, pp. 2289-2294.

Year

2003

ANU Authors

Field of Research

  • Electrical And Electronic Engineering Not Elsewhere Classified

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