ICP Dry Etching of ZnO and Effects of Hydrogen

Citation

Ip, K, Overberg, M, Baik, K et al. 2003, 'ICP Dry Etching of ZnO and Effects of Hydrogen', Solid-State Electronics, vol. 47, pp. 2289-2294.

Year

2003

ANU Authors

Field of Research

  • Electrical And Electronic Engineering Not Elsewhere Classified

Updated:  08 September 2024 / Responsible Officer:  Director (Research Services Division) / Page Contact:  Researchers