Identification of Hydrogen Related Defects in Proton Implanted Float-zone Silicon

Citation

Leveque, P, Hallen, A, Svensson, B et al. 2003, 'Identification of Hydrogen Related Defects in Proton Implanted Float-zone Silicon', European Physical Journal - Applied Physics, vol. 23, pp. 5-9.

Year

2003

Field of Research

  • Materials Engineering Not Elsewhere Classified

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