Ion Beam Damage Processes in GaN

Citation

Kucheyev, S, Williams, J, Zou, J et al 2001, 'Ion Beam Damage Processes in GaN', III-Nitride Based Semiconductor Electronics and Optical Devices and Thirty-Fourth State-of-the-Art-Program on Compound Semiconductors (SOTAPOCS XXXIV), ed. Ren, F.; Buckley, D.N.; Chu, S.N.G.; Pearton, S.J., Electrochemical Society Inc, Pennington, USA, pp. 150-160.

Year

2001

Field of Research

  • Plasma Physics; Fusion Plasmas; Electrical Discharges

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