Efficiency of dislocations and cavities for gettering of Cu and Fe in silico

Citation

Stritzker, B, Petravic, M, Wong Leung, Y et al 2001, 'Efficiency of dislocations and cavities for gettering of Cu and Fe in silicon', Nuclear Instruments and Methods in Physics Research: Section B, vol. 175-177, pp. 154-158.

Year

2001

Field of Research

  • Electrical And Electronic Engineering Not Elsewhere Classified

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