Dynamic Annealing in Ion Implanted SiC: Flux versus Temperature Dependance

Citation

Kuznetsov, A, Wong Leung, Y, Hallen, A et al. 2003, 'Dynamic Annealing in Ion Implanted SiC: Flux versus Temperature Dependance', Journal of Applied Physics, vol. 94, no. 11, pp. 7112-7115.

Year

2003

Field of Research

  • Materials Engineering Not Elsewhere Classified

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