Impurity-free vacancy disordering of quantum heterostructures with SiOxNy encapsulants deposited by magnetron sputtering

Citation

McKerracher, I, Fu, L, Tan, H et al 2008, 'Impurity-free vacancy disordering of quantum heterostructures with SiOxNy encapsulants deposited by magnetron sputtering', Nanoengineering: Fabrication, Properties, Optics, and Devices 2008, ed. Elizabeth A. Dobisz, Louay A. Eldada, SPIE - The International Society for Optical Engineering, Washington, pp. 70390U/1-10.

Year

2008

Field of Research

  • Condensed Matter Physics Not Elsewhere Classified

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