Ion implantation in 4H-SiC

Citation

Wong Leung, Y, Janson, M, Kuznetsov, A et al. 2008, 'Ion implantation in 4H-SiC', Nuclear Instruments and Methods in Physics Research: Section B, vol. 266, pp. 1367-1372.

Year

2008

ANU Authors

Associate Professor Yin-Yin Jennifer Wong Leung
Professor Chennupati Jagadish

Fields of Research

Compound Semiconductors
Condensed Matter Physics Not Elsewhere Classified

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