Correlating properties of PECVD SiNx layers to deposition parameters
Citation
Vora, K, Belay, K, Pyke, D et al 2010, 'Correlating properties of PECVD SiNx layers to deposition parameters', Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD 2010), ed. H. Hoe Tan, Institute of Electrical and Electronics Engineers (IEEE Inc), Australia, pp. 197-198.Year
2010ANU Authors
Field of Research
- Materials Engineering Not Elsewhere Classified