Correlating properties of PECVD SiNx layers to deposition parameters

Citation

Vora, K, Belay, K, Pyke, D et al 2010, 'Correlating properties of PECVD SiNx layers to deposition parameters', Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD 2010), ed. H. Hoe Tan, Institute of Electrical and Electronics Engineers (IEEE Inc), Australia, pp. 197-198.

Year

2010

Fields of Research

  • Materials Engineering Not Elsewhere Classified
  • Nanotechnology

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