Dry-etch of As2S3 thin films for optical waveguide fabrication

Citation

Li, W, Ruan, Y, Luther-Davies, B et al 2005, 'Dry-etch of As2S3 thin films for optical waveguide fabrication', Journal of Vacuum Science and Technology A, vol. 23, no. 6, pp. 1626-1632.

Year

2005

Field of Research

  • Plasma Physics; Fusion Plasmas; Electrical Discharges

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