Dry-etch of As2S3 thin films for optical waveguide fabrication

Citation

Li, W, Ruan, Y, Luther-Davies, B et al. 2005, 'Dry-etch of As2S3 thin films for optical waveguide fabrication', Journal of Vacuum Science and Technology A, vol. 23, no. 6, pp. 1626-1632.

Year

2005

ANU Authors

Field of Research

  • Plasma Physics; Fusion Plasmas; Electrical Discharges

Updated:  27 July 2024 / Responsible Officer:  Director (Research Services Division) / Page Contact:  Researchers