Study of Diffusivity and Electrical Properties of Zr and Hf in Silicon

Citation

Vyvenko, O, Sachdeva, R, Istratov, A et al 2002, 'Study of Diffusivity and Electrical Properties of Zr and Hf in Silicon', Semiconductor Silicon 2002, ed. H R Huff, L Fabry, S Kishino, Electrochemical Society Inc, Pennington NJ, pp. 440-451.

Year

2002

ANU Authors

Field of Research

  • Metals And Alloy Materials

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