Mn implantation for new applications of 4H-SiC

Citation

Linnarsson, M, Wong Leung, Y, Hallen, A et al 2012, 'Mn implantation for new applications of 4H-SiC', International Conference on Silicon Carbide and Related Materials (ICSCRM 2011), Conference Organising Committee, Cleveland USA, pp. 221-224.

Year

2012

Fields of Research

  • Surfaces And Structural Properties Of Condensed Matter
  • Compound Semiconductors
  • Photonics And Electro Optical Engineering (Excl. Communications)

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