Structural, compositional and optical properties of PECVD silicon nitride layers

Citation

Karouta, F, Vora, K, Tian, J et al 2012, 'Structural, compositional and optical properties of PECVD silicon nitride layers', Journal of Physics D: Applied Physics, vol. 45, no. 44, pp. 1-10.

Year

2012

ANU Authors

Fields of Research

  • Surfaces And Structural Properties Of Condensed Matter
  • Nanofabrication, Growth And Self Assembly

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