Unexpected short- and medium-range atomic structure of sputtered amorphous silicon upon thermal annealing

Citation

Haberl, B, Boyle, S, Li, T et al 2011, 'Unexpected short- and medium-range atomic structure of sputtered amorphous silicon upon thermal annealing', Journal of Applied Physics, vol. 110, no. 9, pp. 1-3.

Year

2011

Field of Research

  • Surfaces And Structural Properties Of Condensed Matter

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