SU-8 protective layer in photo-resist patterning on As2S3 film

Citation

Choi, D, Madden, S, Bulla, D et al 2011, 'SU-8 protective layer in photo-resist patterning on As2S3 film', Physica Status Solidi C, vol. 8, no. 11-12, pp. 3183-3186.

Year

2011

Field of Research

  • Photonics, Optoelectronics And Optical Communications

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