SU-8 protective layer in photo-resist patterning on As2S3 film
Citation
Choi, D, Madden, S, Bulla, D et al. 2011, 'SU-8 protective layer in photo-resist patterning on As2S3 film', Physica Status Solidi C, vol. 8, no. 11-12, pp. 3183-3186.Year
2011ANU Authors
Field of Research
- Photonics, Optoelectronics And Optical Communications