Characterization of nanocrystalline nitrogen-containing titanium oxide obtained by N2/O2/Ar low-field helicon plasma sputtering
Citation
Sarra-Bournet, C, Haberl, B, Charles, C et al 2011, 'Characterization of nanocrystalline nitrogen-containing titanium oxide obtained by N2/O2/Ar low-field helicon plasma sputtering', Journal of Physics D: Applied Physics, vol. 44, no. 45, p. 8.Year
2011Field of Research
- Plasma Physics; Fusion Plasmas; Electrical Discharges