Characterization of nanocrystalline nitrogen-containing titanium oxide obtained by N2/O2/Ar low-field helicon plasma sputtering

Citation

Sarra-Bournet, C, Haberl, B, Charles, C et al 2011, 'Characterization of nanocrystalline nitrogen-containing titanium oxide obtained by N2/O2/Ar low-field helicon plasma sputtering', Journal of Physics D: Applied Physics, vol. 44, no. 45, p. 8.

Year

2011

Field of Research

  • Plasma Physics; Fusion Plasmas; Electrical Discharges

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