Investigation of effect of excitation frequency on electron energy distribution functions in low pressure radio frequency bounded plasmas
Citation
Bhattacharjee, S, Lafleur, T, Charles, C et al 2011, 'Investigation of effect of excitation frequency on electron energy distribution functions in low pressure radio frequency bounded plasmas', Physics of Plasmas, vol. 18, no. 7, pp. 072102-7.Year
2011Field of Research
- Plasma Physics; Fusion Plasmas; Electrical Discharges