Investigation of effect of excitation frequency on electron energy distribution functions in low pressure radio frequency bounded plasmas

Citation

Bhattacharjee, S, Lafleur, T, Charles, C et al 2011, 'Investigation of effect of excitation frequency on electron energy distribution functions in low pressure radio frequency bounded plasmas', Physics of Plasmas, vol. 18, no. 7, pp. 072102-7.

Year

2011

Field of Research

  • Plasma Physics; Fusion Plasmas; Electrical Discharges

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