Patterning of silicon by indentation and chemical etching

Citation

Rao, R, Bradby, J & Williams, J 2007, 'Patterning of silicon by indentation and chemical etching', Applied Physics Letters, vol. 91, pp. 123113 1-3.

Year

2007

Field of Research

  • Nanotechnology Not Elsewhere Classified

Updated:  29 March 2024 / Responsible Officer:  Director (Research Services Division) / Page Contact:  Researchers