Channeling Measurements of Ion Implantation Damage in 4H-SiC

Citation

Kuznetsov, A, Janson, M, Hallen, A et al 2001, 'Channeling Measurements of Ion Implantation Damage in 4H-SiC', Materials Science Forum, vol. 353-356, pp. 595-598.

Year

2001

Field of Research

  • Electrical And Electronic Engineering Not Elsewhere Classified

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