Channeling Measurements of Ion Implantation Damage in 4H-SiC
Citation
Kuznetsov, A, Janson, M, Hallen, A et al 2001, 'Channeling Measurements of Ion Implantation Damage in 4H-SiC', Materials Science Forum, vol. 353-356, pp. 595-598.Year
2001ANU Authors
Field of Research
- Electrical And Electronic Engineering Not Elsewhere Classified