Doping of Silicon Carbide by Ion Implantation
Citation
Svensson, B, Hallen, A, Linnarsson, M et al 2001, 'Doping of Silicon Carbide by Ion Implantation', Materials Science Forum, vol. 353-356, pp. 549-554.Year
2001ANU Authors
Field of Research
- Electrical And Electronic Engineering Not Elsewhere Classified