Doping of Silicon Carbide by Ion Implantation

Citation

Svensson, B, Hallen, A, Linnarsson, M et al 2001, 'Doping of Silicon Carbide by Ion Implantation', Materials Science Forum, vol. 353-356, pp. 549-554.

Year

2001

Field of Research

  • Electrical And Electronic Engineering Not Elsewhere Classified

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