Effect of oxygen concentration on nanoindentation-induced phase transformations in ion-implanted amorphous silicon

Citation

Ruffell, S, Vedi, J, Bradby, J et al 2009, 'Effect of oxygen concentration on nanoindentation-induced phase transformations in ion-implanted amorphous silicon', Journal of Applied Physics, vol. 105, no. 083520, pp. 1-6.

Year

2009

Field of Research

  • Condensed Matter Physics Not Elsewhere Classified

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