Low Energy Ion Irradiation of Silicon: Compound Formation and Segregation of Impurities

Citation

Petravic, M, Williams, J & Deenapanray, P 2001, 'Low Energy Ion Irradiation of Silicon: Compound Formation and Segregation of Impurities', 199th Meeting of the Electrochemical Society, ed. Sundaram, K.B.; Deen, M.J.; Landheer, D.; Brown, W.D.; Misra, D.; Allendorf, M.D, Electrochemical Society Inc, Pennington, USA, pp. 147-155.

Year

2001

Field of Research

  • Plasma Physics; Fusion Plasmas; Electrical Discharges

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