Low Energy Ion Irradiation of Silicon: Compound Formation and Segregation of Impurities
Citation
Petravic, M, Williams, J & Deenapanray, P 2001, 'Low Energy Ion Irradiation of Silicon: Compound Formation and Segregation of Impurities', 199th Meeting of the Electrochemical Society, ed. Sundaram, K.B.; Deen, M.J.; Landheer, D.; Brown, W.D.; Misra, D.; Allendorf, M.D, Electrochemical Society Inc, Pennington, USA, pp. 147-155.
Year
2001
Field of Research
- Plasma Physics; Fusion Plasmas; Electrical Discharges