Deep Dry-etch of Silica in a Helicon Plasma Etcher for Optical Waveguide Fabrication

Citation

Li, W, Bulla, D, Love, J et al 2005, 'Deep Dry-etch of Silica in a Helicon Plasma Etcher for Optical Waveguide Fabrication', Journal of Vacuum Science and Technology A, vol. 23, no. 1, pp. 146-150.

Year

2005

Field of Research

  • Classical And Physical Optics

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