Deep Dry-etch of Silica in a Helicon Plasma Etcher for Optical Waveguide Fabrication
Citation
Li, W, Bulla, D, Love, J et al. 2005, 'Deep Dry-etch of Silica in a Helicon Plasma Etcher for Optical Waveguide Fabrication', Journal of Vacuum Science and Technology A, vol. 23, no. 1, pp. 146-150.Year
2005Field of Research
- Classical And Physical Optics
