Implantation Angle Dependent Study of Vacancy Related Defect Profiles in Ion Implanted Silicon

Citation

Lay, M, McCallum, J & Jagadish, C 2003, 'Implantation Angle Dependent Study of Vacancy Related Defect Profiles in Ion Implanted Silicon', Physica B, vol. 340-342, pp. 748-751.

Year

2003

Field of Research

  • Electrical And Electronic Engineering Not Elsewhere Classified

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