Implantation Angle Dependent Study of Vacancy Related Defect Profiles in Ion Implanted Silicon
Citation
Lay, M, McCallum, J & Jagadish, C 2003, 'Implantation Angle Dependent Study of Vacancy Related Defect Profiles in Ion Implanted Silicon', Physica B, vol. 340-342, pp. 748-751.Year
2003ANU Authors
Field of Research
- Electrical And Electronic Engineering Not Elsewhere Classified