Ge-doped SiO2 Thin Films Produced by Helicon Activated Reactive Evaporation
Citation
Li, W, Bulla, D, Charles, C et al. 2002, 'Ge-doped SiO2 Thin Films Produced by Helicon Activated Reactive Evaporation', Thin Solid Films, vol. 419, no. N1-2, pp. 82-87.Year
2002Field of Research
- Plasma Physics; Fusion Plasmas; Electrical Discharges