Ge-doped SiO2 Thin Films Produced by Helicon Activated Reactive Evaporation

Citation

Li, W, Bulla, D, Charles, C et al 2002, 'Ge-doped SiO2 Thin Films Produced by Helicon Activated Reactive Evaporation', Thin Solid Films, vol. 419, no. N1-2, pp. 82-87.

Year

2002

Field of Research

  • Plasma Physics; Fusion Plasmas; Electrical Discharges

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