Implant Isolation of Zn-doped GaAs Epilayers: Effects of Ion Species, Doping Concentration, and Implantation Temperature
Citation
Deenapanray, P, Gao, Q & Jagadish, C 2003, 'Implant Isolation of Zn-doped GaAs Epilayers: Effects of Ion Species, Doping Concentration, and Implantation Temperature', Journal of Applied Physics, vol. 93, no. 11, pp. 9123-9129.Year
2003ANU Authors
Field of Research
- Electrical And Electronic Engineering Not Elsewhere Classified