Defect Formation Due to the Crystallization of Deep Amorphous Volumes Formed in Silicon by Mega Electron Volt (MeV) Ion Implantation

Citation

Liu, A, McCallum, J & Wong Leung, Y 2001, 'Defect Formation Due to the Crystallization of Deep Amorphous Volumes Formed in Silicon by Mega Electron Volt (MeV) Ion Implantation', Journal of Materials Research, vol. 16, no. 11, pp. 3229-3237.

Year

2001

ANU Authors

Field of Research

  • Electrical And Electronic Engineering Not Elsewhere Classified

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