Effect of Crystal Orientation on the Implant Profile of 60keV Al into 4H-SiC Crystals

Citation

Wong Leung, Y, Janson, M & Svensson, B 2003, 'Effect of Crystal Orientation on the Implant Profile of 60keV Al into 4H-SiC Crystals', Journal of Applied Physics, vol. 93, no. 11, pp. 8914-8917.

Year

2003

ANU Authors

Field of Research

  • Materials Engineering Not Elsewhere Classified

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