Plasma etching of As2S3 films for optical waveguides

Citation

Choi, D, Madden, S, Rode, A et al 2008, 'Plasma etching of As2S3 films for optical waveguides', Journal of Non-crystalline Solids, vol. 354, no. 27, pp. 3179 - 3183.

Year

2008

Field of Research

  • Surfaces And Structural Properties Of Condensed Matter

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