Dry Etching of SiO2 Thin Films for Optical Waveguide Fabrication

Citation

Li, W, Bulla, D, Love, J et al 2004, 'Dry Etching of SiO2 Thin Films for Optical Waveguide Fabrication', Australian Conference on Optical Fibre Technology (ACOFT 2004), ed. B. Eggleton, D. Sampson, S. Frisken, A. Mitchell, S. Jackson, A. Ankiewicz, M. S, IREE Society, Canberra, pp. ACOFT-PO19-1-3.

Year

2004

Field of Research

  • Classical And Physical Optics

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