Dry Etching of SiO2 Thin Films for Optical Waveguide Fabrication
Citation
Li, W, Bulla, D, Love, J et al. 2004, 'Dry Etching of SiO2 Thin Films for Optical Waveguide Fabrication', Australian Conference on Optical Fibre Technology (ACOFT 2004), ed. B. Eggleton, D. Sampson, S. Frisken, A. Mitchell, S. Jackson, A. Ankiewicz, M. S, IREE Society, Canberra, pp. ACOFT-PO19-1-3.Year
2004Field of Research
- Classical And Physical Optics
