Indentification of nanoindentation-induced phase changes in silicon by in situ electrical characterization

Citation

Ruffell, S, Bradby, J, Fujisawa PhD, N et al 2007, 'Indentification of nanoindentation-induced phase changes in silicon by in situ electrical characterization', Journal of Applied Physics, vol. 101, pp. 083531 1-7.

Year

2007

Field of Research

  • Electrical And Electronic Engineering Not Elsewhere Classified

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