Nanoindentation-induced phase transformation in crystalline silicon and relaxed amorphous silicon

Citation

Rao, R, Bradby, J, Ruffell, S et al. 2007, 'Nanoindentation-induced phase transformation in crystalline silicon and relaxed amorphous silicon', Microelectronics Journal, vol. 38, pp. 722-726.

Year

2007

ANU Authors

Field of Research

  • Nanotechnology Not Elsewhere Classified

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