Comparison of stress in single and multiple layer depositions of plasma-deposited amorphous silicon dioxide
Citation
Au, V, Charles, C & Boswell, R 2006, 'Comparison of stress in single and multiple layer depositions of plasma-deposited amorphous silicon dioxide', Journal of Physics D: Applied Physics, vol. 39, pp. 164-171.Year
2006Field of Research
- Plasma Physics; Fusion Plasmas; Electrical Discharges