Decoupling ion energy and flux in intermediate pressure capacitively coupled plasmas via tailored voltage waveforms
Citation
Doyle, S, Gibson, A, Boswell, R et al. 2020, 'Decoupling ion energy and flux in intermediate pressure capacitively coupled plasmas via tailored voltage waveforms', Plasma Sources Science and Technology, vol. 29, no. 12.Year
2020Fields of Research
- Plasma Physics; Fusion Plasmas; Electrical Discharges
- Aerospace Engineering Not Elsewhere Classified
- Space And Solar Physics