Decoupling ion energy and flux in intermediate pressure capacitively coupled plasmas via tailored voltage waveforms

Citation

Doyle, S, Gibson, A, Boswell, R et al. 2020, 'Decoupling ion energy and flux in intermediate pressure capacitively coupled plasmas via tailored voltage waveforms', Plasma Sources Science and Technology, vol. 29, no. 12.

Year

2020

Fields of Research

  • Plasma Physics; Fusion Plasmas; Electrical Discharges
  • Aerospace Engineering Not Elsewhere Classified
  • Space And Solar Physics

Updated:  14 June 2024 / Responsible Officer:  Director (Research Services Division) / Page Contact:  Researchers