Decoupling ion energy and flux in intermediate pressure capacitively coupled plasmas via tailored voltage waveforms

Citation

Doyle, S, Gibson, A, Boswell, R et al. 2020, 'Decoupling ion energy and flux in intermediate pressure capacitively coupled plasmas via tailored voltage waveforms', Plasma Sources Science and Technology, vol. 29, no. 12.

Year

2020

ANU Authors

Fields of Research

  • Plasma Physics; Fusion Plasmas; Electrical Discharges
  • Aerospace Engineering Not Elsewhere Classified
  • Space And Solar Physics

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