Redefinition of the self-bias voltage in a dielectrically shielded thin sheath RF discharge
Citation
Ho, T, Charles, C & Boswell, R 2018, 'Redefinition of the self-bias voltage in a dielectrically shielded thin sheath RF discharge', Journal of Applied Physics, vol. 123, no. 19, pp. 1-15.Year
2018Field of Research
- Plasma Physics; Fusion Plasmas; Electrical Discharges