Cross-coupling effect compensation of an AFM piezoelectric tube scanner for improved nanopositioning
Citation
Rana, M, Pota, H & Petersen, I 2014, 'Cross-coupling effect compensation of an AFM piezoelectric tube scanner for improved nanopositioning', ACC 2014 - American Control Conference, IEEE, Piscataway, New Jersey, US, pp. 2456-2461pp.Year
2014ANU Authors
Field of Research
- Control Systems, Robotics And Automation