Cross-coupling effect compensation of an AFM piezoelectric tube scanner for improved nanopositioning

Citation

Rana, M, Pota, H & Petersen, I 2014, 'Cross-coupling effect compensation of an AFM piezoelectric tube scanner for improved nanopositioning', ACC 2014 - American Control Conference, IEEE, Piscataway, New Jersey, US, pp. 2456-2461pp.

Year

2014

Field of Research

  • Control Systems, Robotics And Automation

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