Advances in ion beam modification of semiconductors

Citation

Elliman, R & Williams, J 2015, 'Advances in ion beam modification of semiconductors', Current Opinion in Solid State and Materials Science, vol. 19, no. 1, pp. 49-67.

Year

2015

Fields of Research

  • Surfaces And Structural Properties Of Condensed Matter
  • Compound Semiconductors
  • Nanofabrication, Growth And Self Assembly

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