An experimental and analytical study of an asymmetric capacitively coupled plasma used for plasma polymerization

Citation

Michelmore, A, Whittle, J, Short, R et al 2014, 'An experimental and analytical study of an asymmetric capacitively coupled plasma used for plasma polymerization', Plasma Processes and Polymers, vol. 11, no. 9, pp. 833-841.

Year

2014

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