The use of electron Rutherford backscattering to characterize novel electronic materials as illustrated by a case study of sputter-deposited NbOx films

Citation

Vos, M, Liu, X, Grande, P et al. 2014, 'The use of electron Rutherford backscattering to characterize novel electronic materials as illustrated by a case study of sputter-deposited NbOx films', Nuclear Instruments and Methods in Physics Research: Section B, vol. 340, pp. 58-62.

Year

2014

ANU Authors

Field of Research

  • Surfaces And Structural Properties Of Condensed Matter

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