Determination of thickness and composition of high-k dielectrics using high-energy electrons
Citation
Grande, P, Vos, M, Venkatachalam, D et al. 2013, 'Determination of thickness and composition of high-k dielectrics using high-energy electrons', Applied Physics Letters, vol. 103, no. 7, pp. 071911/1-4.Year
2013Fields of Research
- Condensed Matter Characterisation Technique Development
- Surfaces And Structural Properties Of Condensed Matter