Determination of thickness and composition of high-k dielectrics using high-energy electrons

Citation

Grande, P, Vos, M, Venkatachalam, D et al 2013, 'Determination of thickness and composition of high-k dielectrics using high-energy electrons', Applied Physics Letters, vol. 103, no. 7, pp. 071911/1-4.

Year

2013

Fields of Research

  • Condensed Matter Characterisation Technique Development
  • Surfaces And Structural Properties Of Condensed Matter

Updated:  25 September 2021 / Responsible Officer:  Director (Research Services Division) / Page Contact:  Researchers