Lateral electrostatic accelerometer using radioisotope powered electron lithography

Citation

Y. Lu, S. Ardanuc, and A. Lal, Lateral electrostatic accelerometer using radioisotope powered electron lithography, Proceedings of the 23rd International Conference on Micro Electro Mechanical Systems (MEMS 2010), pp. 360-363, Hong Kong, China, January 24-28, 2010. [Poster presentation, Poster acceptance rate: 25% (223/884)]

Year

2010

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