Acoustic speaker based on high-efficiency broadband nano-pillar photonic crystal opto-thermo-mechanical MEMS excitation

Citation

Y. Lu, and A. Lal, Acoustic speaker based on high-efficiency broadband nano-pillar photonic crystal opto-thermo-mechanical MEMS excitation, Proceedings of the 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 11), pp. 2678-2681, Beijing, China, June 5-9, 2011. [Oral presentation, Oral acceptance rate: 13% (214/1652)]

Year

2011

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