Mass Effects on Regrowth Rates and Activation Energies of Solid-Phase Epitaxy Induced by Ion Beams in Silicon

Citation

Kinomura, A, Williams, J & Fujii, K 1999, 'Mass Effects on Regrowth Rates and Activation Energies of Solid-Phase Epitaxy Induced by Ion Beams in Silicon', Physical Review B, vol. 59, no. 23, pp. 15 214-15 224.

Year

1999

Field of Research

  • Plasma Physics; Fusion Plasmas; Electrical Discharges

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